SERVOPRO NanoTrace DF-560E ULTRA

The NanoTrace DF-560E ULTRA delivers industry-leading ultra-trace oxygen detection

The DF-560E ULTRA has an exceptional Lower Detection Limit (LDL) of 45 parts-per-trillion (ppt). Once the DF-560E ULTRA is measuring below 1ppb the units automatically convert to ppt providing the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.

  • High stability coulometric trace and ultra-trace measurements
  • A no-compromise solution
  • Simple maintenance and reduced ongoing costs

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Enquiry

Get in touch to tell us what you need and the application you plan to use it for

Consultation

Our expert team will help you select the right product package, ensuring you have the accessories and support to get the best performance from your analyzer

Fulfilment

Your analyzer will be assembled in one of our state-of-the-art engineering centers and rapidly dispatched to your site

Ultra-trace oxygen measurements at the lowest levels

Joseph Ha
Joseph Ha
Product Manager, Purity & Specialty

Designed to measure ultra-trace O2 to the very lowest levels, the DF-560E ULTRA delivers the semiconductor industry an industry-leading 45ppt LDL. Our new DF-560E ULTRA firmware will automatically change units as it monitors your sample gas down to the ppt levels. Flexible and adaptable, it is able to monitor O2 in multiple background gases while logging data in a variety of formats.

The DF-560E ULTRA negates the effects of upset-prone applications, thanks to Servomex’s high-stability Coulometric sensing technology, which delivers a fast speed of response in the presence of sample and flow rate change.

Designed for ease of use

Ideal for semiconductor fabs and analytical carts, the DF-560E ULTRA is optimized for ease of use and portability. Operation is made via the front panel or digital communications, while hand-carry options make it easy to transport.

The DF-560E ULTRA also reduces operational costs through its non-depleting, factory-calibrated Coulometric technology, providing cost-effective setup and configuration. The only ongoing maintenance requirement is an annual span calibration, with no programmable cell replacement needed.

Oxygen Tank Beside Patient Bed In Hospital.

High stability coulometric trace and ultra-trace measurements

When you require the measurement of ultra-trace oxygen as a contaminant, either for quality control or leak detection purposes, you need a gas analyzer that delivers performance, stability and reliability. The lowest LDL is essential, as is the ability to carry out consistent, high stability measurements in upset prone applications, where sample and flow rate fluctuations can occur. Adaptable configuration options that can measure multiple background gases and flexible portability is also needed, as is comprehensive data logging and graphical records. No matter what your application needs, you’ll want an analyzer that can reduce your ongoing costs and provide operational efficiencies, and we don’t believe you should have to compromise.

Shot Of Sterile High Precision Manufacturing Laboratory Where Scientists In

A no-compromise solution

The DF-560E ULTRA delivers oxygen measurement to the very lowest levels, delivering users an exceptional LDL of 45ppt. This industry-leading performance is augmented by a variety of extended operational capabilities. Automated maintenance executes automatic zero and span calibrations on a scheduled basis, or executes scheduled automatic checks and notifies users when calibration is needed. An automatic maintenance log records solution additions, sensor data, and calibration activity to ensure ISO record-keeping requirements, while automated data logging builds four-day and thirty-day graphical records of analyzer readings.

Korea service centre

Simple maintenance and reduced ongoing costs

The DF-560E ULTRA offers an attractive cost reduction over product life, thanks to its pre-calibrated, long-life sensor that comes with a 5 year warranty. The DF-560E ULTRA requires only an annual span calibration thereafter, with no programmable cell replacement requirement. Automated maintenance logging is also provided and the DF-560E ULTRA is available with a choice of calibration options; automatic zero and span on a scheduled basis and notifications of a need for calibration; and a manual calibration system – compactly integrated on the rear of the panel, permitting enhanced device portability.

Man with Servomex System components

Integrate our expertise into your system

If you’re looking to include the DF-560E ULTRA in your new or existing system, our expert team can help. For advice, project management and high-quality engineering, get in touch today to find out more.

Industry-leading benefits

The DF-560E ULTRA is a flexible, adaptable solution for ultra-trace oxygen measurements in UHP gases.

High performance

Unrivaled performance

The DF-560E ULTRA’s LDL of 45ppt O2 is the lowest level available to the semiconductor industry and the display reading will automatically change from ppb to ppt.

Unique flow sensor

Ideal for upset-prone applications

The highly stable Coulometric sensor used by the DF-560E ULTRA compensates for sample and flow rate fluctuations, providing consistent, high-stability measurements.

Maintain red

Extended operational capabilities

Automated maintenance performs zero and span calibrations on a scheduled basis, or executes scheduled automatic checks and notifies users when calibration is needed.

Unrivalled performance

  • Industry-leading 45ppt Lower Detection Limit (LDL)
  • Uses industry-leading low drift, highly stable Coulometric E-sensor technology
  • Fast speed of response to quickly alert operators of out-of-specification gas conditions

Flexible

  • Suitable for use with H2, He, N2, Ar, and other inert gases‡
  • Sensor accommodates sample flow rate fluctuations
  • Usable in 18 different sample gases, standard with our gas scale factor feature

Easy to use

  • Optional calibration system for compact integration onto the rear of the analyzer
  • Operable via front panel or digital communication options
  • Comprehensive automated datalogging with 4-day and 30-day graphical reading records

Low cost of ownership

  • Factory-calibrated sensors for simplified commissioning
  • Non-depleting Coulometric sensor with an industry-leading five-year warranty
  • Requires only an annual SPAN calibration and quarterly RSA fluid replenishment
  • Manufactured by Servomex – over 70 years of experience with thousands of units in the field

Benchmark compliance

  • RoHS 3 and REACH
  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

‡consult servomex for other gases

Using our non-depleting, highly stable Coulometric O2 sensor, the DF-560E ULTRA monitors the lowest levels of O2 in multiple background gases.

Gas Measurement
Oxygen (O₂)ppm, ppb, ppt

Technologies

Coulometric

Certificates

  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

Schematics (select to expand)

Size

308mm (12.1”) Wide x 235 (9.3”) High x 255mm (10”) Deep

Weight

10kg (22lbs)

Get the detailed specifications

“For in-depth specifications you’ll want to download our technical datasheet which includes information on technology, performance, operating environment, sample conditions and compliance along with technical drawings and top-level benefits and applications.”

Joseph Ha
Joseph Ha
Product Manager, Purity & Specialty

Download all the DF-560E ULTRA information you need

“We’ve compiled a complete resource pack full of information about the DF-560E ULTRA, all in one easy download. Get it now to learn about the benefits and technical specifications of the industry-leading ultra-trace oxygen analyzer.”

Joseph Ha
Joseph Ha
Product Manager, Purity & Specialty

Manuals and brochures

Want more information about the features and advantages of the DF-560E ULTRA? Download the product brochure now.

SERVOPRO DF-560E Operator Manual

Your guide to installing and operating your trace oxygen analyzer

SERVOPRO DF-560E Operator Manual

Your guide to installing and operating your trace oxygen analyzer

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DF-500 Series expert paper

Our expert paper explains the technology behind the DF-500 series - download it now

DF-500 Series expert paper

Our expert paper explains the technology behind the DF-500 series - download it now

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DF-500 Series Recommended Spares

Get the full list of spares available to support our DF-500 Series analyzers

DF-500 Series Recommended Spares

Get the full list of spares available to support our DF-500 Series analyzers

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See for yourself

Our videos give you the chance to watch our products in action and hear from our experts. You can also see our analyzers unboxed, and find out more about our solutions for key applications

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Total UHP solutions

Find out how we empower ultra-high purity gas processes with a reliable single-supplier solution in this video showcasing our innovative solutions.

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Part 3: Meet our new President

Servomex President James Gravestock outlines our role in shaping the future of the industries we serve in the third part of our exclusive interview.

Typical applications

UHP Gases / Semiconductors

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